Resists in microlithography and printing

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Bibliographic Details
Other Authors:	Kralicek, Jaroslav, Zachoval, Jaromir
Format:	Book
Published:	Amsterdam Elsevier 1993
Edition:	2nd rev. ed
Series:	Materials science monographs v76
Subjects:	Microlithography Integrated circuits > Very large scale integration > Design and construction Semiconductors > Design and construction
Online Access:	Click Here to View Status and Holdings.
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001	wils-118467
020	#	#	\|a 0444988467
090	0	0	\|a TK7871.85 \|b .b375313 1993
245	1	1	\|a Resists in microlithography and printing \|c by B. Bednar
250	#	#	\|a 2nd rev. ed
260	#	#	\|a Amsterdam \|b Elsevier \|c 1993
300	#	#	\|a 376 p. \|b ill \|c 25 cm
490	1	#	\|a Materials science monographs \|v v76
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microlithography
650	#	0	\|a Integrated circuits \|x Very large scale integration \|x Design and construction
650	#	0	\|a Semiconductors \|x Design and construction
700	1	#	\|a Kralicek, Jaroslav
700	#	#	\|a Zachoval, Jaromir
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=118467
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam