Resists in microlithography and printing

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Bibliographic Details
Other Authors:	Kralicek, Jaroslav, Zachoval, Jaromir
Format:	Book
Published:	Amsterdam Elsevier 1993
Edition:	2nd rev. ed
Series:	Materials science monographs v76
Subjects:	Microlithography Integrated circuits > Very large scale integration > Design and construction Semiconductors > Design and construction
Online Access:	Click Here to View Status and Holdings.
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