Resists in microlithography and printing

Resists in microlithography and printing

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Bibliographic Details
Other Authors: Kralicek, Jaroslav, Zachoval, Jaromir
Format: Unknown
Published: Amsterdam Elsevier 1993
Edition:2nd rev. ed
Series:Materials science monographs v76
Subjects:
Microlithography
Integrated circuits > Very large scale integration > Design and construction
Semiconductors > Design and construction
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:376 p. ill 25 cm
Bibliography:Includes bibliographical references and index
ISBN:0444988467

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