Chemical perspectives of microelectronic materials III proceedings of the ... held November 30-December 3, 1992

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Bibliographic Details
Corporate Authors:	Symposium on Chemical Perspectives of Microelectronic Materials III, Materials Research Society
Other Authors:	Abernathy, C. R
Format:	Book
Published:	Pittsburgh, Pa. Materials Research Society 1993
Series:	Materials Research Society symposium proceedings v. 282
Subjects:	Surface chemistry > Congresses Microelectronics > Materials > Congresses Semiconductors > Congresses
Online Access:	Click Here to View Status and Holdings.
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MARC


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090	0	0	\|a TK7874 \|b .S96 1993
110	1	#	\|a Symposium on Chemical Perspectives of Microelectronic Materials III \|j Boston, Massachusetts \|k 1992
245	1	1	\|a Chemical perspectives of microelectronic materials III \|b proceedings of the ... held November 30-December 3, 1992 \|c editors, C. R. Abernathy ... [et al.]
260	#	#	\|a Pittsburgh, Pa. \|b Materials Research Society \|c 1993
300	#	#	\|a xv, 727 p. \|b ill. \|c 24 cm
490	1	#	\|a Materials Research Society symposium proceedings \|v v. 282
504	#	#	\|a Includes bibliographical references and indexes
650	#	0	\|a Surface chemistry \|x Congresses
650	#	0	\|a Microelectronics \|x Materials \|x Congresses
650	#	0	\|a Semiconductors \|x Congresses
700	1	#	\|a Abernathy, C. R
710	1	#	\|a Materials Research Society
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