Chemical perspectives of microelectronic materials III proceedings of the ... held November 30-December 3, 1992

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Bibliographic Details
Corporate Authors:	Symposium on Chemical Perspectives of Microelectronic Materials III, Materials Research Society
Other Authors:	Abernathy, C. R
Format:	Book
Published:	Pittsburgh, Pa. Materials Research Society 1993
Series:	Materials Research Society symposium proceedings v. 282
Subjects:	Surface chemistry > Congresses Microelectronics > Materials > Congresses Semiconductors > Congresses
Online Access:	Click Here to View Status and Holdings.
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