Chemical perspectives of microelectronic materials III proceedings of the ... held November 30-December 3, 1992

Chemical perspectives of microelectronic materials III proceedings of the ... held November 30-December 3, 1992

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Bibliographic Details
Corporate Authors: Symposium on Chemical Perspectives of Microelectronic Materials III, Materials Research Society
Other Authors: Abernathy, C. R
Format: Book
Published: Pittsburgh, Pa. Materials Research Society 1993
Series:Materials Research Society symposium proceedings v. 282
Subjects:
Surface chemistry > Congresses
Microelectronics > Materials > Congresses
Semiconductors > Congresses
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xv, 727 p. ill. 24 cm
Bibliography:Includes bibliographical references and indexes
ISBN:1558991778

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