Search Results - "Microtechnology and MEMS"
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Suggested Topics within your search.
- Microelectromechanical systems 3
- Design and construction 2
- Microelectronics 2
- Atomic force microscopy 1
- Detectors 1
- Diodes, Semiconductor 1
- Equipment and supplies 1
- Gas detectors 1
- Integrated circuits 1
- Levers 1
- Mathematical models 1
- Metal oxide semiconductors, Complementary 1
- Micromachining 1
- Silicon 1
- Solid-state lasers 1
- Transducers 1
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1
Mechanical microsensors
Published 2001“…Microtechnology and MEMS…”
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2
Laser diode microsystems
Published 2004“…Microtechnology and MEMS…”
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3
Modelling of microfabrication systems
Published 2003“…Microtechnology and MEMS,…”
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4
CMOS cantilever sensor systems atomic force microscopy and gas sensing applications
Published 2002“…Microtechnology and MEMS…”
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