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Plasma etching
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Plasma etching
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Photons and low energy particles in surface processing proceedings of the ... held December 3-6, 1991
Published 1992
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Materials modification by energetic atoms and ions Symposium held April 28-30, 1992, San Francisco, California, USA
Published 1992
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Dry etching for microelectronics
Published 1984
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T - Technology
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Materials Research Society
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Ashby, Carol Iris Hill 1953-
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Brannon, James H
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Grabowski, Kenneth S
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Pang, Stella W
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Powell, Ronald A
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Symposium on Photons and Low Energy Particles in Surface Processing
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