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  1. 1
    Microsystem technology and microbotics

    Microsystem technology and microbotics by Fatikow, S. 1960-

    Published 1997
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  2. 2
    Introduction to microfabrication

    Introduction to microfabrication by Franssila, Sami

    Published 2004
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  3. 3
    MEMS design and fabrication

    MEMS design and fabrication

    Published 2006
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  4. 4
    Fundamentals of MICROFABRICATION AND NANOTECHNOLOGY VOLUME III From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications

    Fundamentals of MICROFABRICATION AND NANOTECHNOLOGY VOLUME III From MEMS to Bio-MEMS and Bio-NEMS : Manufacturing Techniques and Applications by Madou, Marc J.

    Published 2012
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  5. 5
    Robotic microassembly

    Robotic microassembly

    Published 2010
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  6. 6
    Microoptics and nanooptics fabrication

    Microoptics and nanooptics fabrication

    Published 2010
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  7. 7
    MAKERS The New Industrial Revolution

    MAKERS The New Industrial Revolution by Anderson, Chris 1961-

    Published 2012
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