Fundamentals of semiconductor fabrication

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Bibliographic Details
Main Author:	May, Gary S.
Other Authors:	Sze, S. M. 1936-
Format:	Book
Language:	English
Published:	New York Wiley 2004
Edition:	Wiley international ed.
Subjects:	Semiconductors > Design and construction
Online Access:	Click Here to View Status and Holdings.
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245	1	0	\|a Fundamentals of semiconductor fabrication \|c Gary S. May, Simon M. Sze.
250	#	#	\|a Wiley international ed.
264	#	1	\|a New York \|b Wiley \|c 2004
300	#	#	\|a xiii, 305 pages \|b illustrations \|c 26 cm
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504	#	#	\|a Includes bibliographical references and index
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700	1	#	\|a Sze, S. M. \|d 1936-
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