Fundamentals of semiconductor fabrication
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New York
Wiley
2004
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| Edition: | Wiley international ed. |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xiii, 305 pages illustrations 26 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9780471232797 |
Fundamentals of semiconductor fabrication