STUDY ON THE TRAGETS FOR PZT THIN FILMS FABRICATION PROCESS USING RF REACTIVE SPUTTERING
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis |
| Online Access: | Click Here to View Status and Holdings. |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Add Tag Be the first to leave a comment!
Reactive sputter deposition 
Optical diagnostics for thin film processing