STUDY ON THE TRAGETS FOR PZT THIN FILMS FABRICATION PROCESS USING RF REACTIVE SPUTTERING

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Bibliographic Details
Main Author:	Sukreen Hana Herman (Author)
Format:	Thesis
Online Access:	Click Here to View Status and Holdings.
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100	0	#	\|a Sukreen Hana Herman \|e author
245	1	0	\|a STUDY ON THE TRAGETS FOR PZT THIN FILMS FABRICATION PROCESS USING RF REACTIVE SPUTTERING \|c Sukreen Hana Herman, Abdul Karimi Halim
264	#	0	\|a SHAH ALAM, SELANGOR \|b UNIVERSITI TEKNOLOGI MARA, INSTITUT PENYELIDIKAN, PEMBANGUNAN DAN PENGKOMERSILAN \|c 2006
500	#	#	\|a UiTM X Digitization
502	#	#	\|a Research report- UNIVERSITI TEKNOLOGI MARA, INSTITUT PENYELIDIKAN, PEMBANGUNAN DAN PENGKOMERSILAN, 2006
040	#	#	\|a Shah Alam
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=952766
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