Computational modeling in semiconductor processing

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Bibliographic Details
Other Authors:	Meyyappan, M
Format:	Unknown
Published:	Boston Artech House 1995
Series:	The Artech House materials science library
Subjects:	Process control > Mathematical models Semiconductors > Design and construction > Data processing
Online Access:	Click Here to View Status and Holdings.
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Description
Physical Description:	x, 363 p. ill. 24 cm
Bibliography:	Includes bibliographical references and index
ISBN:	0890067074

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