Computational modeling in semiconductor processing

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Bibliographic Details
Other Authors: Meyyappan, M
Format: Book
Published: Boston Artech House 1995
Series:The Artech House materials science library
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Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:x, 363 p. ill. 24 cm
Bibliography:Includes bibliographical references and index
ISBN:0890067074