Computational modeling in semiconductor processing
Saved in:
Other Authors: | |
---|---|
Format: | Book |
Published: |
Boston
Artech House
1995
|
Series: | The Artech House materials science library
|
Subjects: | |
Online Access: | Click Here to View Status and Holdings. |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Physical Description: | x, 363 p. ill. 24 cm |
---|---|
Bibliography: | Includes bibliographical references and index |
ISBN: | 0890067074 |