FABRICATION P⁺- N JUNCTION USING SPIN ON DOPANT
Diffusion and doping were major process by which chemical species or dopant was introducing into a semiconductor such as silicon to form the electronic device. The result shows that the ideal I-V curve formed and sheet resistance increase with the increase of concentration of Boron and longer rotati...
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| Format: | Thesis Book |
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Shah Alam, Selangor
Universiti Teknologi MARA. Faculty of Applied Science
2010
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| Online Access: | Click Here to View Status and Holdings. |
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Silicon technologies ion implantation and thermal treatment
Fundamentals of semiconductor fabrication
Microchip fabrication
