Microelectronic processing an introduction to the manufacture of integrated circuits
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Main Author: | |
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Format: | Book |
Published: |
New York
McGraw-Hill
1987
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Series: | McGraw-Hill series in electrical engineering
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Subjects: | |
Online Access: | Click Here to View Status and Holdings. |
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LEADER | 00000n a2200000 a 4501 | ||
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001 | wils-74133 | ||
020 | # | # | |a 0070542805 |
090 | 0 | 0 | |a TK7874 |b .R87 1987 |
100 | 1 | # | |a Ruska, W. Scot |q (Walter Scot |
245 | 1 | 1 | |a Microelectronic processing |b an introduction to the manufacture of integrated circuits |c W. Scot Ruska |
260 | # | # | |a New York |b McGraw-Hill |c 1987 |
300 | # | # | |a xviii, 430 p. |b ill. |c 25 cm |
490 | 1 | # | |a McGraw-Hill series in electrical engineering |
504 | # | # | |a Includes bibliographies and index |
650 | # | 0 | |a Integrated circuits |x Design and construction |
856 | 4 | 0 | |z Click Here to View Status and Holdings. |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=74133 |
964 | # | # | |c BOK |d 01 |
040 | # | # | |a Shah Alam |