Microelectronic processing an introduction to the manufacture of integrated circuits

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Bibliographic Details
Main Author: Ruska, W. Scot (Walter Scot
Format: Book
Published: New York McGraw-Hill 1987
Series:McGraw-Hill series in electrical engineering
Subjects:
Online Access:Click Here to View Status and Holdings.
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090 0 0 |a TK7874  |b .R87 1987 
100 1 # |a Ruska, W. Scot  |q (Walter Scot 
245 1 1 |a Microelectronic processing  |b an introduction to the manufacture of integrated circuits  |c W. Scot Ruska 
260 # # |a New York  |b McGraw-Hill  |c 1987 
300 # # |a xviii, 430 p.  |b ill.  |c 25 cm 
490 1 # |a McGraw-Hill series in electrical engineering 
504 # # |a Includes bibliographies and index 
650 # 0 |a Integrated circuits  |x Design and construction 
856 4 0 |z Click Here to View Status and Holdings.  |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=74133 
964 # # |c BOK  |d 01 
040 # # |a Shah Alam