Microelectronic processing an introduction to the manufacture of integrated circuits

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Bibliographic Details
Main Author: Ruska, W. Scot (Walter Scot
Format: Book
Published: New York McGraw-Hill 1987
Series:McGraw-Hill series in electrical engineering
Subjects:
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Description
Physical Description:xviii, 430 p. ill. 25 cm
Bibliography:Includes bibliographies and index
ISBN:0070542805