VLSI electronics microstructure science

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Bibliographic Details
Other Authors:	Einspruch, Norman G
Format:	Unknown
Published:	New York Academic Press 1989
Subjects:	Integrated circuits > Very large scale integration
Online Access:	Click Here to View Status and Holdings.
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MARC


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001	wils-65902
020	#	#	\|a 012234121X
090	0	0	\|a TK7874 \|b .V56vol.21 1989
245	1	1	\|a VLSI electronics \|b microstructure science \|c edited by Norman G. Einspruch
260	#	#	\|a New York \|b Academic Press \|c 1989
300	#	#	\|a xii, 546 p. \|b ill. \|c 24 cm
500	#	#	\|a Beginning with vol. 6, some vols. edited by Norman G. Einspruch with other editors
504	#	#	\|a Includes bibliographies and indexes
650	#	0	\|a Integrated circuits \|x Very large scale integration
700	1	#	\|a Einspruch, Norman G
745	#	#	\|a Beam processing technologies
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=65902
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
998	#	#	\|a 00260##a002.8.2\|\|00260##b002.8.4\|\|00260##c002.7.6\|\|00300##a003.4.1\|\|00300##b003.6.1\|\|00300##c003.5.1\|\|00500##a002.17.2\|\|