Contamination control and cleanrooms problems, engineering solutions, and applications

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Bibliographic Details
Main Author:	Lieberman, Alvin 1921-
Format:	Book
Published:	New York Van Nostrand Reinhold 1992
Subjects:	Clean rooms Decontamination (from gases, chemicals, etc)
Online Access:	Click Here to View Status and Holdings.
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001	wils-62540
020	#	#	\|a 0442005741
090	0	0	\|a TH7694 \|b .L54 1992
100	1	#	\|a Lieberman, Alvin \|d 1921-
245	1	1	\|a Contamination control and cleanrooms \|b problems, engineering solutions, and applications \|c Alvin Lieberman
260	#	#	\|a New York \|b Van Nostrand Reinhold \|c 1992
300	#	#	\|a viii, 411 p. \|b ill. \|c 24 cm
504	#	#	\|a Includes bibliographical references and index.
650	#	0	\|a Clean rooms
650	#	0	\|a Decontamination (from gases, chemicals, etc)
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=62540
964	#	#	\|c BOK \|d 01
040	#	#	\|a Shah Alam
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