Introduction to Semiconductor Manufacturing Technology
This book is written for technology students taking their first course in semiconductor manufacturing. It contains comprehensive and up-to-date information on this fast-changing industry.
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| Main Author: | |
|---|---|
| Format: | Manuscript Book |
| Language: | English |
| Published: |
Bellingham, Washington
Society of Photo-Optical Instrumentation Engineers (SPIE)
2012
©2012 |
| Edition: | Second edition |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Semiconductor manufacturing technology 
Fundamentals of semiconductor fabrication