Introduction to Semiconductor Manufacturing Technology
This book is written for technology students taking their first course in semiconductor manufacturing. It contains comprehensive and up-to-date information on this fast-changing industry.
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington
Society of Photo-Optical Instrumentation Engineers (SPIE)
2012
©2012 |
| Edition: | Second edition |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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| LEADER | 00000ntm a2200000#i 4501 | ||
|---|---|---|---|
| 001 | wils-561985 | ||
| 005 | 201816155449 | ||
| 008 | 180407t2012 WAU ae# ##001 ##ENG#D | ||
| 020 | # | # | |a 9780819490926 |q paperback |
| 040 | # | # | |a DLC |d UiTM |e rda |
| 041 | 0 | # | |a eng |
| 090 | 0 | 0 | |a TK7871.85 |b .X53 2012 |
| 100 | 1 | # | |a Xiao,Hong |
| 245 | 1 | 0 | |a Introduction to Semiconductor Manufacturing Technology |c Hong Xiao |
| 250 | # | # | |a Second edition |
| 264 | # | 1 | |a Bellingham, Washington |b Society of Photo-Optical Instrumentation Engineers (SPIE) |c 2012 |
| 264 | # | 1 | |c ©2012 |
| 300 | # | # | |a xxx, 664 pages |b illustrations |c 26 cm |
| 336 | # | # | |a text |2 rdacontent |
| 337 | # | # | |a unmediated |2 rdamedia |
| 338 | # | # | |a volume |2 rdacarrier |
| 504 | # | # | |a Includes bibliographical references and indexes |
| 520 | # | # | |a This book is written for technology students taking their first course in semiconductor manufacturing. It contains comprehensive and up-to-date information on this fast-changing industry. |
| 526 | 0 | # | |a ELE643 |b EE241 |5 EE |
| 526 | 0 | # | |a Semiconductor Manufacturing Tech. |b Bachelor Of Engineering (Hons) Electronics Engineering |5 Faculty of Electrical Engineering |
| 650 | # | 0 | |a Semiconductors |x Design and construction |
| 650 | # | 0 | |a Semiconductor industry |
| 856 | 4 | 0 | |z Click Here to View Status and Holdings. |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=561985 |
| 998 | # | # | |a 00250##a006.2.2||00250##b006.2.2||00255##a006.2.2||00260##a006.2.2||00260##b006.2.2||00260##c006.2.2||00264#1a006.2.2||00264#1b006.2.2||01264#1a006.2.2||01264#1b006.2.2||00300##a006.2.2||00300##b006.2.2||00300##c006.2.2||00500##a006.2.2||00502##a006.2.2||00520##a006.2.2||00520##b006.2.2||00538##a006.2.2||00546##a006.2.2||00730##a006.2.2||00730##d006.2.2||00730##f006.2.2||00730##n006.2.2||00730##p006.2.2|| |
Semiconductor manufacturing technology