VLSI electronics microstructure science
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| Format: | Book |
| Published: |
Orlando
Academic
1985
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| Online Access: | Click Here to View Status and Holdings. |
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Table of Contents:
- v. 1-5. [without special titles]
- v. 6. Materials and process characterization
- v. 7. [without special title]
- v. 8. Plasma processing for VLSI
- v. 9. [without special title]
- v. 10. Surface and interface effects in VLSI
- v. 11. GaAs mi
VLSI electronics microstructure science