VLSI electronics microstructure science

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Bibliographic Details
Other Authors:	Einspruch, Norman G
Format:	Unknown
Published:	Orlando Academic 1985
Subjects:	Integrated circuits > Very large scale integration
Online Access:	Click Here to View Status and Holdings.
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LEADER	00000n a2200000 a 4501
001	wils-49629
020	#	#	\|a 0122341112
040	#	#	\|a DLC \|c DLC \|d DLC
090	#	#	\|a TK7874 \|b .V56 1985
245	#	#	\|a VLSI electronics \|b microstructure science \|c edited by Norman G. Einspruch and W. R. Wisseman
260	#	#	\|a Orlando \|b Academic \|c 1985
300	#	#	\|a 459 p. \|b ill. \|c cm
500	#	#	\|a Beginning with vol. 6, some vols. edited by Norman G. Einspruch with other editors.
504	#	#	\|a Includes bibliographies and indexes.
505	#	#	\|a v. 1-5. [without special titles] -- v. 6. Materials and process characterization -- v. 7. [without special title] -- v. 8. Plasma processing for VLSI -- v. 9. [without special title] -- v. 10. Surface and interface effects in VLSI -- v. 11. GaAs mi
650	#	0	\|a Integrated circuits \|x Very large scale integration
700	#	#	\|a Einspruch, Norman G
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=49629
964	#	#	\|c BOK \|d 01
998	#	#	\|a 00245##a002.3.2\|\|00245##b002.3.3\|\|00245##c002.3.2\|\|00260##a002.8.2\|\|00260##b002.8.4\|\|00260##c002.7.6\|\|00300##a003.4.1\|\|00300##b003.6.1\|\|00300##c003.5.1\|\|00500##a002.17.2\|\|00700##a0011.2.2\|\|