Technology evolution for silicon nano-electronics

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Bibliographic Details
Corporate Author:	International Symposium on Technology Evolution for Silicon Nano-Electronics
Other Authors:	Miyazaki, Seiichi, Tabata, Hitoshi
Format:	Book
Published:	Stafa-Zurich, Switzerland Trans Tech Publications 2011
Series:	Key engineering materials v. 470
Subjects:	Nanostructured materials > Congresses Nanoelectronics > Congresses Metal oxide semiconductors > Congresses
Online Access:	Click Here to View Status and Holdings.
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001	wils-477225
020	#	#	\|a 9783037850510 (pbk.)
020	#	#	\|a 3037850515 (pbk.)
040	#	#	\|a CUS \|d ITMB
090	0	0	\|a TK7874.84 \|b .I54 2011
110	1	#	\|a International Symposium on Technology Evolution for Silicon Nano-Electronics \|c Tokyo Institute of Technology \|d (2010
245	1	0	\|a Technology evolution for silicon nano-electronics \|c edited by Seiichi Miyazaki and Hitoshi Tabata
246	3	0	\|a Proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics
246	3	0	\|a International Symposium on Technology Evolution for Silicon Nano-Electronics
260	#	#	\|a Stafa-Zurich, Switzerland \|b Trans Tech Publications \|c 2011
300	#	#	\|a xi, 234 p. \|b ill. \|c 25 cm
490	1	#	\|a Key engineering material \|v v. 470 \|x 1013-9826
504	#	#	\|a Includes bibliographical references and indexes
650	#	0	\|a Nanostructured materials \|x Congresses
650	#	0	\|a Nanoelectronics \|x Congresses
650	#	0	\|a Metal oxide semiconductors \|x Congresses
700	1	#	\|a Miyazaki, Seiichi
700	#	#	\|a Tabata, Hitoshi
830	#	1	\|a Key engineering materials \|v v. 470
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=477225
964	#	#	\|c BOK \|d EM
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