Technology evolution for silicon nano-electronics

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Bibliographic Details
Corporate Author: International Symposium on Technology Evolution for Silicon Nano-Electronics
Other Authors: Miyazaki, Seiichi, Tabata, Hitoshi
Format: Book
Published: Stafa-Zurich, Switzerland Trans Tech Publications 2011
Series:Key engineering materials v. 470
Subjects:
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xi, 234 p. ill. 25 cm
Bibliography:Includes bibliographical references and indexes
ISBN:9783037850510 (pbk.)
3037850515 (pbk.)
ISSN:1013-9826