NEMS/MEMS technology and devices

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Bibliographic Details
Corporate Author:	International Conference on Materials for Advanced Technologies
Other Authors:	Khine, Lynn, Tsai, Julius M.
Format:	Unknown
Published:	Durnten-Zurich Trans Tech Publications 2011
Series:	Advanced materials research v. 254
Subjects:	Microelectromechanical systems > Congresses Nanoelectromechanical systems > Congresses
Online Access:	Click Here to View Status and Holdings.
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