NEMS/MEMS technology and devices

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Bibliographic Details
Corporate Author:	International Conference on Materials for Advanced Technologies
Other Authors:	Khine, Lynn, Tsai, Julius M.
Format:	Book
Published:	Durnten-Zurich Trans Tech Publications 2011
Series:	Advanced materials research v. 254
Subjects:	Microelectromechanical systems > Congresses Nanoelectromechanical systems > Congresses
Online Access:	Click Here to View Status and Holdings.
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001	wils-477219
020	#	#	\|a 9783037851456 (pbk.)
020	#	#	\|a 3037851457 (pbk.)
040	#	#	\|a UKMGB \|d ITMB
090	0	0	\|a TK7875 \|b .I54 2011
110	1	#	\|a International Conference on Materials for Advanced Technologies \|c Singapore \|d (2011
245	1	0	\|a NEMS/MEMS technology and devices \|c edited by Lynn Khine and Julius M. Tsai
260	#	#	\|a Durnten-Zurich \|b Trans Tech Publications \|c 2011
300	#	#	\|a x, 229 p. \|b ill. \|c 25 cm
490	1	#	\|a Advanced materials research \|v v. 254 \|x 1022-6680
504	#	#	\|a Includes bibliographical references and indexes
650	#	0	\|a Microelectromechanical systems \|x Congresses
650	#	0	\|a Nanoelectromechanical systems \|x Congresses
700	1	#	\|a Khine, Lynn
700	#	#	\|a Tsai, Julius M.
830	#	1	\|a Advanced materials research \|v v. 254
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=477219
964	#	#	\|c BOK \|d EM