NEMS/MEMS technology and devices

NEMS/MEMS technology and devices

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Bibliographic Details
Corporate Author: International Conference on Materials for Advanced Technologies
Other Authors: Khine, Lynn, Tsai, Julius M.
Format: Unknown
Published: Durnten-Zurich Trans Tech Publications 2011
Series:Advanced materials research v. 254
Subjects:
Microelectromechanical systems > Congresses
Nanoelectromechanical systems > Congresses
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:x, 229 p. ill. 25 cm
Bibliography:Includes bibliographical references and indexes
ISBN:9783037851456 (pbk.)
3037851457 (pbk.)
ISSN:1022-6680

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