NEMS/MEMS technology and devices
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| Corporate Author: | |
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| Other Authors: | , |
| Format: | Book |
| Published: |
Durnten-Zurich
Trans Tech Publications
2011
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| Series: | Advanced materials research
v. 254 |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | x, 229 p. ill. 25 cm |
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| Bibliography: | Includes bibliographical references and indexes |
| ISBN: | 9783037851456 (pbk.) 3037851457 (pbk.) |
| ISSN: | 1022-6680 |
NEMS/MEMS technology and devices selected peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, Symposium L, 28 June - 3 July, Singapore