Silicon technologies ion implantation and thermal treatment

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Bibliographic Details
Other Authors:	Baudrant, Annie
Format:	Unknown
Published:	London Wiley 2011
Subjects:	Semiconductor doping > Heat treatment Ion implantation Semiconductors > Heat treatment
Online Access:	Click Here to View Status and Holdings.
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MARC


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001	wils-477010
020	#	#	\|a 9781848212312 (hbk.)
020	#	#	\|a 1848212313 (hbk.)
040	#	#	\|a DLC \|d ITMB
090	0	0	\|a TK7871.85 \|b .S55 2011
245	0	0	\|a Silicon technologies \|b ion implantation and thermal treatment \|c edited by Annie Baudrant
260	#	#	\|a London \|b Wiley \|c 2011
300	#	#	\|a xvii, 337 p. \|b ill. \|c 24 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Semiconductor doping \|x Heat treatment
650	#	0	\|a Ion implantation
650	#	0	\|a Semiconductors \|x Heat treatment
700	1	#	\|a Baudrant, Annie
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=477010
964	#	#	\|c BOK \|d EE
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