Silicon technologies ion implantation and thermal treatment
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| Format: | Unknown |
| Published: |
London
Wiley
2011
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| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xvii, 337 p. ill. 24 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9781848212312 (hbk.) 1848212313 (hbk.) |
Ion implantation