A guide to hands-on MEMS design and prototyping

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Bibliographic Details
Main Author:	Kubby, Joel A.
Format:	Book
Language:	English
Published:	Cambridge, UK Cambridge University Press 2011
Subjects:	Microelectromechanical systems
Online Access:	Click Here to View Status and Holdings.
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100	1	#	\|a Kubby, Joel A.
245	1	2	\|a A guide to hands-on MEMS design and prototyping \|c Joel A. Kubby
260	#	#	\|a Cambridge, UK \|b Cambridge University Press \|c 2011
300	#	#	\|a xi, 166 p., [16] p. of plates \|b ill. (some col.) \|c 24 cm
504	#	#	\|a Includes bibliographical references and index
650	#	1	\|a Microelectromechanical systems
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