A guide to hands-on MEMS design and prototyping
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Cambridge, UK
Cambridge University Press
2011
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xi, 166 p., [16] p. of plates ill. (some col.) 24 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9780521889254 (hbk.) 0521889251 (hbk.) |
Foundations of MEMS