Ceramic thick films for MEMS and microdevices

Ceramic thick films for MEMS and microdevices

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Bibliographic Details
Main Author:	Dorey, Robert A.
Format:	Unknown
Published:	Waltham, [MA] William Andrew 2012
Series:	Micro & nano technologies
Subjects:	Thick-film circuits > Design and construction Microelectromechanical systems > Design and construction Nanoelectronics > Design and construction
Online Access:	Click Here to View Status and Holdings.
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