Ceramic thick films for MEMS and microdevices

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Bibliographic Details
Main Author:	Dorey, Robert A.
Format:	Unknown
Published:	Waltham, [MA] William Andrew 2012
Series:	Micro & nano technologies
Subjects:	Thick-film circuits > Design and construction Microelectromechanical systems > Design and construction Nanoelectronics > Design and construction
Online Access:	Click Here to View Status and Holdings.
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LEADER	00000n a2200000 a 4501
001	wils-471184
020	#	#	\|a 9781437778175 (hbk.)
020	#	#	\|a 1437778178 (hbk.)
040	#	#	\|a UKMGB \|d ITMB
090	0	0	\|a TK7871.15.F5 \|b D67 2012
100	1	#	\|a Dorey, Robert A.
245	1	0	\|a Ceramic thick films for MEMS and microdevices \|c Robert A. Dorey.
260	#	#	\|a Waltham, [MA] \|b William Andrew \|c 2012
300	#	#	\|a xviii, 191 p. \|b ill. \|c 24 cm
490	1	#	\|a Micro and nano technologies series
504	#	#	\|a Includes bibliographical references (p. 183-185) and index
650	#	0	\|a Thick-film circuits \|x Design and construction
650	#	0	\|a Microelectromechanical systems \|x Design and construction
650	#	0	\|a Nanoelectronics \|x Design and construction
830	#	1	\|a Micro & nano technologies
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=471184
964	#	#	\|c BOK \|d EM
998	#	#	\|a 00260##a002.8.2\|\|00260##b002.8.4\|\|00260##c002.7.6\|\|00300##a003.4.1\|\|00300##b003.6.1\|\|00300##c003.5.1\|\|