Ceramic thick films for MEMS and microdevices

Ceramic thick films for MEMS and microdevices

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Bibliographic Details
Main Author: Dorey, Robert A.
Format: Unknown
Published: Waltham, [MA] William Andrew 2012
Series:Micro & nano technologies
Subjects:
Thick-film circuits > Design and construction
Microelectromechanical systems > Design and construction
Nanoelectronics > Design and construction
Online Access:Click Here to View Status and Holdings.
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Description
Physical Description:xviii, 191 p. ill. 24 cm
Bibliography:Includes bibliographical references (p. 183-185) and index
ISBN:9781437778175 (hbk.)
1437778178 (hbk.)

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