Lithography main techniques
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Format: | Book |
Published: |
London Hoboken, NJ
ISTE Wiley
2011
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Online Access: | Click Here to View Status and Holdings. |
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LEADER | 00000n a2200000 a 4501 | ||
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001 | wils-462690 | ||
020 | # | # | |a 9781848212022 (hardback) |
020 | # | # | |a 184821202X (hardback) |
040 | # | # | |a DLC |d ITMB |
090 | 0 | 0 | |a TK7872.M3 |b L58 2011 |
245 | 0 | 0 | |a Lithography |b main techniques |c edited by Stefan Landis |
260 | # | # | |a London |a Hoboken, NJ |b ISTE |b Wiley |c 2011 |
300 | # | # | |a xxv, 377 p. |b ill. |c 25 cm |
504 | # | # | |a Includes bibliographical references and index |
650 | # | 0 | |a Microlithography |
700 | 1 | # | |a Landis, Stefan. |
856 | 4 | 0 | |z Click Here to View Status and Holdings. |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=462690 |
964 | # | # | |c BOK |d EH |
998 | # | # | |a 00260##a002.8.2||00260##a002.8.2||00260##b002.8.4||00260##b002.8.4||00260##c002.7.6||00300##a003.4.1||00300##b003.6.1||00300##c003.5.1|| |