Lithography main techniques

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Bibliographic Details
Other Authors:	Landis, Stefan
Format:	Unknown
Published:	London Hoboken, NJ ISTE Wiley 2011
Subjects:	Microlithography
Online Access:	Click Here to View Status and Holdings.
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MARC


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001	wils-462690
020	#	#	\|a 9781848212022 (hardback)
020	#	#	\|a 184821202X (hardback)
040	#	#	\|a DLC \|d ITMB
090	0	0	\|a TK7872.M3 \|b L58 2011
245	0	0	\|a Lithography \|b main techniques \|c edited by Stefan Landis
260	#	#	\|a London \|a Hoboken, NJ \|b ISTE \|b Wiley \|c 2011
300	#	#	\|a xxv, 377 p. \|b ill. \|c 25 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microlithography
700	1	#	\|a Landis, Stefan.
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=462690
964	#	#	\|c BOK \|d EH
998	#	#	\|a 00260##a002.8.2\|\|00260##a002.8.2\|\|00260##b002.8.4\|\|00260##b002.8.4\|\|00260##c002.7.6\|\|00300##a003.4.1\|\|00300##b003.6.1\|\|00300##c003.5.1\|\|