Lithography main techniques
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| Format: | Unknown |
| Published: |
London Hoboken, NJ
ISTE Wiley
2011
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| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xxv, 377 p. ill. 25 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9781848212022 (hardback) 184821202X (hardback) |
Nano-lithography