Cleanroom technology fundamentals of design, testing and operation
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Main Author: | |
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Format: | Book |
Published: |
Hoboken, NJ
John Wiley & Sons
2010
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Edition: | 2nd ed |
Subjects: | |
Online Access: | Click Here to View Status and Holdings. |
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Item Description: | Includes index |
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Physical Description: | xi, 367 p. ill 24 cm |
ISBN: | 9780470748060 (cloth) 0470748060 (cloth) |