Micro electro mechanical systems (MEMS) technology, fabrication processes, and applications

Saved in:

Bibliographic Details
Other Authors:	Ekwall, Britt, Cronquist, Mikkel
Format:	Book
Published:	Hauppauge, NY Nova Science Publishers 2010
Subjects:	Microelectromechanical systems
Online Access:	Click Here to View Status and Holdings.
Tags:	Add Tag No Tags, Be the first to tag this record!

MARC


LEADER	00000n a2200000 a 4501
001	wils-451951
020	#	#	\|a 9781608764747 (hardcover : alk. paper)
020	#	#	\|a 1608764745 (hardcover : alk. paper)
040	#	#	\|a DLC \|d ITMB
090	0	0	\|a TK7875 \|b .M5284 2010
245	0	0	\|a Micro electro mechanical systems (MEMS) \|b technology, fabrication processes, and applications \|c editors, Britt Ekwall and Mikkel Cronquist
260	#	#	\|a Hauppauge, NY \|b Nova Science Publishers \|c 2010
300	#	#	\|a xii, 301 p. \|b ill. (some col.) \|c 27 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microelectromechanical systems
700	1	#	\|a Ekwall, Britt
700	1	#	\|a Cronquist, Mikkel
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=451951
964	#	#	\|c BOK \|d AS