Micro electro mechanical systems (MEMS) technology, fabrication processes, and applications
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| Other Authors: | , |
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| Format: | Book |
| Published: |
Hauppauge, NY
Nova Science Publishers
2010
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xii, 301 p. ill. (some col.) 27 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9781608764747 (hardcover : alk. paper) 1608764745 (hardcover : alk. paper) |
MEMS mechanical sensors