NEMS/MEMS technology and devices selected peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, Symposium L, 28 June - 3 July, Singapore
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| Format: | Conference Proceeding |
| Published: |
Stafa-ZurichbTrans Tech
2009
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| Series: | Advanced materials research
v. 74 |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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| 245 | 0 | 0 | |a NEMS/MEMS technology and devices |b selected peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, Symposium L, 28 June - 3 July, Singapore |c edited by Selin Teo ... [et al.] |
| 260 | # | # | |a Stafa-ZurichbTrans Tech |c 2009 |
| 300 | # | # | |a xi, 348 p. |b ill. |c 25 cm |
| 490 | 1 | # | |a Advanced materials research |v v. 74 |x 1022-6680 |
| 504 | # | # | |a Includes bibliographical references and index |
| 650 | # | 0 | |a Microelectromechanical systems |v Congresses |
| 650 | # | 0 | |a Nanoelectromechanical systems |v Congresses |
| 700 | 1 | # | |a Teo, Selin |
| 711 | 1 | # | |a International Conference on Materials for Advanced Technologies |c Singapore |d 2009 |
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NEMS/MEMS technology and devices