NEMS/MEMS technology and devices selected peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, Symposium L, 28 June - 3 July, Singapore
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| Format: | Conference Proceeding |
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Stafa-ZurichbTrans Tech
2009
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| Series: | Advanced materials research
v. 74 |
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| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xi, 348 p. ill. 25 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 0878493212 9780878493210 |
| ISSN: | 1022-6680 |
NEMS/MEMS technology and devices