Reactive sputter deposition

Reactive sputter deposition

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Bibliographic Details
Other Authors:	Depla, D., Mahieu, S.
Format:	Book
Published:	Berlin, NY Springer 2008
Series:	Springer series in materials science 109
Subjects:	Thin films Cathode sputtering (Plating process)
Online Access:	Click Here to View Status and Holdings.
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