Reactive sputter deposition

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Bibliographic Details
Other Authors:	Depla, D., Mahieu, S.
Format:	Book
Published:	Berlin, NY Springer 2008
Series:	Springer series in materials science 109
Subjects:	Thin films Cathode sputtering (Plating process)
Online Access:	Click Here to View Status and Holdings.
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MARC


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001	wils-446588
005	201502318811
008	110919s2008 gw eng
020	#	#	\|a 3540766626 (hbk.)
020	#	#	\|a 9783540766629 (hbk.)
040	#	#	\|a DLC \|d ITMB
090	0	0	\|a TS695 \|b .R43 2008
245	0	0	\|a Reactive sputter deposition \|c D. Depla, S. Mahieu, editors
260	#	#	\|a Berlin, NY \|b Springer \|c 2008
300	#	#	\|a xviii, 570 p. \|b ill. (some col.) \|c 25 cm
490	1	#	\|a Springer series in materials science \|v 109
504	#	#	\|a Includes bibliographical references and index
650	#	1	\|a Thin films
650	#	#	\|a Cathode sputtering (Plating process)
700	1	#	\|a Depla, D.
700	#	#	\|a Mahieu, S.
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=446588
964	#	#	\|c BOK \|d AS
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