Reactive sputter deposition
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| Other Authors: | , |
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| Format: | Book |
| Published: |
Berlin, NY
Springer
2008
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| Series: | Springer series in materials science
109 |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xviii, 570 p. ill. (some col.) 25 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 3540766626 (hbk.) 9783540766629 (hbk.) |
Thin-film deposition principles and practice