Principles of microelectromechanical systems

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Bibliographic Details
Main Author: Lee, Ki Bang
Format: Unknown
Published: Hoboken, N.J. WILEY 2011
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Online Access:Click Here to View Status and Holdings.
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100 1 # |a Lee, Ki Bang 
245 1 0 |a Principles of microelectromechanical systems  |c Ki Bang Lee 
260 # # |a Hoboken, N.J.  |b WILEY  |c 2011 
300 # # |a xii, 667 p.  |b ill.  |c 25 cm 
504 # # |a Includes bibliographical references and index 
650 # 0 |a Microelectromechanical systems 
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