Principles of microelectromechanical systems
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| Main Author: | |
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| Format: | Unknown |
| Published: |
Hoboken, N.J.
WILEY
2011
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xii, 667 p. ill. 25 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 9780470466346 |
Introduction to microelectromechanical systems engineering