Nano-lithography

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Bibliographic Details
Other Authors:	Landis, Stefan
Format:	Book
Language:	English French
Published:	London, UK ISTE/ Wiley 2011
Subjects:	Microlithography Nanotechnology
Online Access:	Click Here to View Status and Holdings.
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001	wils-439772
020	#	#	\|a 1848212119
020	#	#	\|a 9781848212114
040	#	#	\|a DLC \|d ITMB
041	#	#	\|a eng \|h fre
090	0	0	\|a TK7872.M3 \|b N3613 2011
130	1	#	\|a Nanolithography \|l English
245	1	0	\|a Nano-lithography \|c edited by Stefan Landis
260	#	#	\|a London, UK \|b ISTE/ \|b Wiley \|c 2011
300	#	#	\|a xxv, 325 p. \|b ill. \|c 24 cm
504	#	#	\|a Includes bibliographical references and index
650	#	0	\|a Microlithography
650	#	0	\|a Nanotechnology
700	1	#	\|a Landis, Stefan
856	4	0	\|z Click Here to View Status and Holdings. \|u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=439772
964	#	#	\|c BOK \|d EE
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