Nano-lithography
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| Other Authors: | |
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| Format: | Book |
| Language: | English French |
| Published: |
London, UK
ISTE/ Wiley
2011
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| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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Add Tag | Physical Description: | xxv, 325 p. ill. 24 cm |
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| Bibliography: | Includes bibliographical references and index |
| ISBN: | 1848212119 9781848212114 |
Lithography main techniques