Foundations of MEMS
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| Main Author: | |
|---|---|
| Format: | Book |
| Published: |
Upper Saddle River, N.J.
Prentice Hall
2012
|
| Edition: | 2nd ed |
| Subjects: | |
| Online Access: | Click Here to View Status and Holdings. |
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| LEADER | 00000n a2200000 a 4501 | ||
|---|---|---|---|
| 001 | wils-439722 | ||
| 020 | # | # | |a 9780132497367 |
| 020 | # | # | |a 0132497360 |
| 040 | # | # | |a DLC |d ITMB |
| 090 | 0 | 0 | |a TK7875 |b .L48 2012 |
| 100 | 1 | # | |a Liu, Chang |c Ph.D. |
| 245 | 1 | 0 | |a Foundations of MEMS |c Chang Liu |
| 250 | # | # | |a 2nd ed |
| 260 | # | # | |a Upper Saddle River, N.J. |b Prentice Hall |c 2012 |
| 300 | # | # | |a xiv, 562 p. |b ill. |c 24 cm |
| 504 | # | # | |a Includes bibliographical references and index |
| 650 | # | 0 | |a Microelectromechanical systems |
| 856 | 4 | 0 | |z Click Here to View Status and Holdings. |u https://opac.uitm.edu.my/opac/detailsPage/detailsHome.jsp?tid=439722 |
| 964 | # | # | |c BOK |d EE |
Foundations of MEMS